“With the anticipated growth in the MEMS market, MEMS manufacturing must advance rapidly to address emerging market requirements,” said Tony McKie, CEO of memsstar. “The need for high-performance MEMS devices is driving new development efforts to reduce process variations, and improve uniformity and reliability. The ALPHA system brings our unique, production-proven processing technology to R&D facilities to accelerate MEMS process development. Bosch is one of the major innovators in MEMS devices and we are delighted to play a part in Bosch’s future products.”
The ORBIS platform is an enabling technology for next-generation MEMS manufacturing. It includes fully integrated process monitoring and endpoint control, a high-selectivity package and a proven hardware that delivers excellent uniformity and repeatability, critical to improving yield. The ALPHA was designed for R&D facilities and is based on memsstar’s production-proven continuous-flow processing technology. This combination of benefits enables advanced process development on a cost-effective platform.