Modutek Corporation is working with WRS Materials which provides silicon wafer polishing services, on a 450mm wafer cleaning development project.
Richard Mee, President of WRS Materials, says, “Modutek Corporation’s expertise on tank design and wet clean technology was crucial to our 450mm upgrade”.
The new cleaning line will feature Modutek custom designed chemical baths that will incorporate Kiajo megasonics and custom wafer furniture capable of handling five 450mm wafers per fixture.
Doug Wagner, President/CEO of Modutek Corporation, comments, “We were able to offer WRS new processing methods that will help them provide critical cost effective solutions to their customers. It will work to reduce the overall cost of the initial 450mm investments.”
He goes on to say, “Our collaboration with WRS provided us the opportunity to utilise our custom designed semiconductor wet processing equipment and ensures they meet all SEMI standard requirements.”
This new reclaim line is among the first in operation globally and will reclaim 450mm wafers for most of the blue chip OEM’s. With a growing demand and the high cost of 450mm silicon wafers, reclaiming wafers will be a vital resource to the industry for many years to come.
Worldwide, the 2011 reclaim wafer market was estimated at $374 million and is expected to reach as high as $413 million in 2013. “Technology advancements are driving higher quality standards, these new specifications demand constant investment in better tool sets, strong engineering support and improved training for our production staff. Fortunately we have found a willing partner in Modutek to help in all three areas”, comments Richard Mee.
Wagner adds, “Modutek’s Megasonic Cleaning Equipment offers a precision cleaning system that was developed for the unique requirements of the Semiconductor, FPD, Hard Disk, Solar and Crystal industries. Our engineers work closely with our customers to provide a solution for each specific application.”